Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.90: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Influence of growth conditions on the crystallization behaviour of reactively magnetron sputtered amorphous molybdenum oxide films — •Sven C. Liepertz, Gomathi Natarajan, Dominik Köhl, Peter Zalden, and Matthias Wuttig — Institute of Physics IA, RWTH Aachen University

The objective of the present work is the synthesis and characterization of meta-stable crystalline phases of group IV and VI transition metal oxides. To grow such specimen, amorphous films are deposited by reactive magnetron sputtering of the elemental transition metal target. Crystallization is induced by thermal annealing and studied by XRD (phase information), SEM and optical microscopy (morphology). Special emphasis is put on the influence of specific features of the amorphous matrix on the crystallization behaviour. Particularly, the stoichiometry of the precursor is tailored by adjusting the deposition process parameters. The elemental composition of such specimen is deduced from RBS measurements. The optical properties of amorphous and crystalline films are investigated by spectroscopic ellipsometry and reflections/transmittance measurements in the UV/VIS spectral region. The optical data is modelled to determine the dielectric function which has been related to the crystallization behaviour. The focus of the present study is on the investigation of MoO₃ films. It will be shown that films with different crystallization behaviour and corresponding crystalline phases can be fabricated by tailoring film deposition and subsequent annealing.