Dresden 2011 – scientific programme

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DS: Fachverband Dünne Schichten

DS 45: Ion Interactions with Nano Scale Materials I (Focused Session -- Organisers: Diesing, Facsko)

DS 45.6: Talk

Thursday, March 17, 2011, 12:30–12:45, GER 37

Ion Beam Irradiation of Nanostructures - A 3D Monte Carlo Simulation Code — •Christian Borschel and Carsten Ronning — Institut für Festkörperphysik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena

We have developed a computer program for the simulation of ion beam irradiation of nanostructures. The code uses a Monte Carlo algorithm to simulate the transport of energetic ions through matter, similar to the often used SRIM code. When irradiating nanostructures, which are of the same size as the ion range or the dimension of the damage cascade, new effects occur as compared to bulk. Our code can account for these effects by allowing almost arbitrary 3-dimensional target structures as opposed to the layered target structures used in SRIM. Thus, more accurate 3D distributions of implanted ions and implantation damage for nanostructures can be obtained. The functionality of the code is demonstrated by comparing simulations with experimental results from ion beam implantation into nanowires.