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DS: Fachverband Dünne Schichten
DS 8: Thin Film Characterisation: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS, ...) I
DS 8.3: Talk
Monday, March 14, 2011, 10:45–11:00, GER 38
Comparison of quantitative X-Ray Fluorescence Spectrometry under normal and grazing incidence condition by means of buried nanolayers — •Rainer Unterumsberger1, Beatrix Pollakowski1, Matthias Müller1, Burkhard Beckhoff1, Wolfgang Ensinger2, Peter Hoffmann2, Tobias Adler2, and Andreas Klein2 — 1Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany — 2Institute of Materials Science, Technische Universität Darmstadt, Petersenstr. 32, 64287 Darmstadt, Germany
Non-destructive thickness determination of nanolayer and thin films becomes more and more important. The quantitative X-Ray Fluorescence Spectrometry (XRF) with synchrotron radiation is a well-established method for thickness determination of thin layers. Under grazing incidence condition (GIXRF), due to total reflection of the incidence beam the x-ray standing wave (XSW) field occurs. That enables near surface quantification of lowest depositions and the possibility of buried nanolayer quantification. In this work quantitative XRF and GIXRF will be compared and the advantages and limits of both methods will be demonstrated. Within a project of the German Science Foundation (DFG), a special sample system was investigated. It consists of buried borcarbide nanolayers varying in thickness deposited on 10 nm titanium and covered with 2.5 nm silicon dioxide. All layered structures are deposited on silicon-wafers. The measurements were carried out in the PTB laboratory at BESSY II. The result of the buried nanolayer thicknesses matches in both methods.