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DS: Fachverband Dünne Schichten
DS 8: Thin Film Characterisation: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS, ...) I
DS 8.4: Vortrag
Montag, 14. März 2011, 11:00–11:15, GER 38
X-ray Reflectivity and Grazing Incidence X-ray Diffraction — •Markus Meyl1, Bogdan Szymański2, Arno Ehresmann1, and Feliks Stobiecki2 — 1University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany — 2Institute of Molecular Physics, Polish Academy of Sciences, Mariana Smoluchowskiego 17, 60-179 Poznań, Poland
X-ray Reflectivity and Grazing Incidence X-ray Diffraction in Bragg-Brentano-Geometry and by the Guinier-Process for the investigation of thin films will be discussed. The Guinier-Process as compared to the Seemann-Bohlin-Geometry includes the use of a monochromator between the X-ray tube and the sample for achieving strictly monochromatic incident X-rays as well as its very small angle of incidence. As a result the diffraction spectra have less background signal and higher intensities. Furthermore the structural information which can be received by these methods will be mentioned. From the spectra measured with the Bragg-Brentano-Geometry the layer thicknesses, the interface roughness's and the densities of the thin films can be determined. In addition the diffraction spectrum obtained with the Guinier-Process provides e.g. information about the lattice parameter, the lattice type and the crystallite sizes. In the last part exemplary results of thin films on a silicon substrate will be presented.