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HL: Fachverband Halbleiterphysik

HL 44: Poster Session I

HL 44.55: Poster

Tuesday, March 15, 2011, 18:00–21:00, P3

Investigation of growth catalysts for ZnO nanopillar growth — •Manfred Madel, Ingo Tischer, Benjamin Neuschl, Tobias Meisch, Martin Feneberg, Uwe Röder, and Klaus Thonke — Institut für Quantenmaterie / Gruppe Halbleiterphysik, Universität Ulm

ZnO nanopillars were grown in hexagonal and cubic arrangements employing self-assembling polystyrene (PS) spheres to pre-pattern a-plane sapphire substrates on which gold, silver or a metal free zinc oxide seedlayer were deposited. A cubic arrangement of the PS spheres is achieved with a spin coating method. To remove the catalyst regions not protected by the PS spheres we apply wet-chemical etching. In a CVD growth process ZnO nanopillars with diameters between 200 and 500 nm and lengths up to 5 µ m are grown in hexagonal and cubic arrangements. The influence of growth catalysts on growth and crystal quality is investigated and compared by cathodoluminescence, photoluminescence, energy dispersive X-ray spectroscopy and high resolution X-ray diffraction measurements.