Dresden 2011 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 44: Poster Session I

HL 44.78: Poster

Dienstag, 15. März 2011, 18:00–21:00, P3

Investigation of morphological changes of SrTiO₃ surfaces induced by annealing and ion bombardment — •Ralph Strohmeyer, Juliane Seibt, Florian Hanzig, Tina Nestler, Mandy Koitzsch, Hartmut Stöcker, Barbara Abendroth, and Dirk C. Meyer — TU Bergakademie Freiberg, Institut für Experimentelle Physik, Leipziger Straße 23, 09596 Freiberg

Strontium titanate is a promising oxide semiconductor in which oxygen vacancies act as intrinsic donors. In order to produce n-doped layers, several approaches to modify the crystal surface are possible. Different methods of vacuum annealing and ion implantation are commonly used. Here, we use atomic force microscopy to study SrTiO₃ single crystal surfaces that were modified according to these known methods to investigate whether the surface structure is changed during the process and if the electrical properties correlate with these changes. Based on the morphology of the untreated surface, which shows a terrace structure with step heights equal to the dimensions of the cubic SrTiO₃ unit cell, the exposure to heat leads to a formation of ’bubble-like’ structures and possibly even local melting and recrystallization. The kind of restructuring strongly depends on temperature and exposure time. The implantation of different ions (i.e. of Ar, O and H) is found to have a comparatively weaker impact on the surface morphology.