Dresden 2011 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 76: Nitride-based Green Lasers
HL 76.3: Talk
Thursday, March 17, 2011, 12:15–12:30, POT 51
Growth and characterization of AlInN for cladding layers in long wavelength GaN based laser structures — •Ernst Ronald Buß1, Heiko Bremers1, Uwe Rossow1, Egidijus Sakalauskas2, Rüdiger Goldhahn3, and Andreas Hangleiter1 — 1Institute of Applied Physics, TU Braunschweig, Mendelssohnstraße 2, Braunschweig — 2Institute of Physics, TU Ilmenau, Weimarer Straße 32, Ilmenau — 3Institute of Experimental Physics, Otto-von-Guericke-University Magdeburg, Universitätsplatz 2, Magdeburg
Cladding layers in actual GaN based laser structures usually consist of AlGaN, or AlGaN/GaN superlattices. Alloying GaN with AlN does always lead to strain in the whole compositional range, and the difference of the refractive indices of GaN and AlGaN is very small. In contrast AlInN can be grown matched to the a-lattice constant of GaN, so the stress in these structures can be minimized. Furthermore, the refractive index contrast is about 0.08 at 530 nm resulting in a better optical confinement in green laser structures.
The samples are grown by low pressure MOVPE. To optimize growth conditions parameters like temperature, reactor pressure and source fluxes has been varied. HRXRD measurements on samples with xIn≈0.179 show pseudomorphic growth and lattice matching for 845∘C and 50mbar. Investigations by AFM exhibit smooth surfaces with low RMS roughnesses built up of small domains surrounding pits generated by crystal defects. The refractive index and the band gap energy are obtained from spectroscopic ellipsometry. Optical gain has already been shown and first laser structures are realized.