Dresden 2011 – scientific programme
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MI: Fachverband Mikrosonden
MI 4: Poster: Microanalysis and Microscopy
MI 4.2: Poster
Monday, March 14, 2011, 17:30–19:30, P5
Angular backscatter filtering with an immersion lens SEM — •Ingo Gestmann1, Ben Lich1, Libor Novak2, Eric Bosch1, and Lubos Tuma2 — 1FEI Company, Achtseweg 5, 5600KA Eindhoven, The Netherlands — 2FEI Company, Podnikatelska 6, 61200 Brno, Czech Republic
Over the last few decades the use of scanning electron microscopy (SEM) in the characterization of materials has shifted from the simple imaging case to a more complex, multi-modal imaging and analysis model, using the various signals that are available as a result of beam-specimen interactions. These signals can be collected simultaneously and even mixed in real time.
The value of using secondary electron (SE) imaging information in addition to backscattered electron (BSE) imaging, as well as the analytical possibilities such as energy dispersive spectroscopy (EDS), electron backscattered electron diffraction (EBSD) and wavelength dispersive spectroscopy (WDS) is widely recognised, but of growing importance is the ability to also differentiate different energy bands in SE and BSE signals, allowing us to extract even more information from the SEM image.
The detection efficiency of various angles of the BSE signal can be optimized using a magnetic immersion field in combination with stage bias. Experimental results can also be compared with simulations, to get a better understanding of the origin of signals and their correlation with specific features of the specimen.