Dresden 2011 – scientific programme

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MM: Fachverband Metall- und Materialphysik

MM 31: Postersitzung II

MM 31.26: Poster

Wednesday, March 16, 2011, 17:15–18:45, P5

Micro-fabricated arrays of SU-8 capillaries with electro-plated front electrodes — •Katharina Huhn, Markus Piechotka, Torsten Henning, and Peter J. Klar — 1. Physikalisches Institut, Justus-Liebig-Universität, 35392 Giessen

We manufactured thin capillaries out of the negative resist SU-8 with multiple step photolithography. To avoid the formation of stress cracking, a special photomask pattern was designed. The inner diameter of the capillaries varied from 10 to 20 microns whilst the height was in the range of 40 to 100 microns. Afterwards a metal grid structure was deposited onto the top surface of the capillaries using evaporation and lift-off techniques as well as electro-plating.

The aim of this work is to study the feasibility of this method to produce an ionic liquid emitter. SU-8 with its high aspect ratio and easy handling suits the required conditions well. Additionally, SU-8 provides an electric isolating behaviour as needed.

To investigate the shape accuracy and possible defects we used optical, atomic force (AFM) as well as scanning electron microscopy (SEM).