Dresden 2011 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 23: Scanning probe methods II
O 23.5: Vortrag
Montag, 14. März 2011, 18:15–18:30, WIL C307
Ac and dc Conductivity measurements vs. KPFM - a methodical study — •Anne-Dorothea Müller1, Falk Müller1, Stefanie Wengel1, Kin Mun Wong2, and Yong Lei2 — 1Anfatec Instruments AG, Melanchthonstr. 28, 08606 Oelsnitz, Germany — 2Institute of Materials Physics & Center for Nanotechnology , University of Münster, 48149 Muenster, Germany
This contribution compares a large variety of electrical analysis methods in AFM, such as KPFM, dynamic EFM, CAFM, conductance microscopy and related spectroscopy. In order to push the limits of lateral resolution and to challenge the tip by means of geometry and electrical behavior at the same time, all investigations are carried out on metal nano-dot arrays on silicon with an almost one by one by one ratio of dot diameter, dot height and dot distance. Differences in achievable local resolution and dependencies on the tip geometry and conductance are explained and carefully discussed with the help of numerical simulations.