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O: Fachverband Oberflächenphysik

O 31: Nanostructures at surfaces: Dots, particles, clusters, arrays II

O 31.4: Vortrag

Dienstag, 15. März 2011, 12:00–12:15, WIL C107

Dimensional Nanometrology with Grazing Incidence Small Angle X-ray Scattering (GISAXS) — •Jan Wernecke, Michael Krumrey, Levent Cibik, Stefanie Marggraf, and Peter Müller — Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin

Reliable methods for dimensional characterisation of structures in the nanometer range are now a necessity in many fields of industry and science, e.g. for next-generation EUV lithography, new photovoltaic devices or magnetic nanoparticles. The method we have chosen for measurements of statistically averaged structural properties of nanostructured surfaces is GISAXS. This is a versatile technique to probe statistic properties such as mean particle size, spacial distribution and roughness of nanostructured surfaces and nanoparticle assemblies on top of or buried in bulk material. The GISAXS experiments were performed at the Four-Crystal Monochromator (FCM) beamline in the laboratory of PTB at BESSY II using the SAXS setup of the Helmholtz-Zentrum Berlin (HZB). This presentation will give a short overview of the instrumentation and the capabilities of the laboratory to perform dimensional nanometrology with GISAXS and will show first experimental results. Gratings for EUV lithography have been investigated in terms of coating layer thickness, roughness, grating period and blaze angle. Furthermore, dimensional properties of Au nanoparticles on silicon substrate were determined. The obtained particle sizes were in good agreement with SAXS measurements of these particles in liquid suspension.