Dresden 2011 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 78: Surface chemical reactions
O 78.1: Vortrag
Donnerstag, 17. März 2011, 15:00–15:15, WIL B122
Investigations on induced dissociation of Dicobaltoctacarbonyl — •Johannes Schwenk, Evgenia Begun, Fabrizio Porrati, Roland Sachser, and Michael Huth — Physikalisches Institut, Goethe-Universität, D-60438 Frankfurt am Main, Germany
Dicobaltoctacarbonyl (Co2(CO)8) is used as a precursor gas for focused electron beam induced deposition (FEBID) performed in a scanning electron mikroscope. In order to understand the processes which lead to the dissociation of the precursor we performed in situ electrical conductivity measurements during the FEBID process and right after it. In particular, the influence of the composition of the residual gas in the vacuum chamber on a possible autocatalysis of the Co2(CO)8 → Co reaction was studied. We observed an enhanced spontaneous dissociation of Co2(CO)8 on thermal silicondioxide surfaces after using a plasma downstream asher. For a characterisation of the obtained films we performed an X-ray diffraction analysis and made temperature-dependent conductivity and magnetotransport measurements.