Dresden 2011 – wissenschaftliches Programm

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Q: Fachverband Quantenoptik und Photonik

Q 15: Poster 1: Quanteninformation, Quanteneffekte, Laserentwicklung, Laseranwendungen, Ultrakurze Pulse, Photonik

Q 15.59: Poster

Montag, 14. März 2011, 16:30–19:30, P1

High-resolution Optical Nanospectrometers for Medical Applications using Substrate Conformal Imprint Lithography as Novel 3D Fabrication Technique — •Alla Albrecht, Xiaolin Wang, Hanh H. Mai, Timo Schotzko, Imran Memon, Martin Bartels, and Hartmut Hillmer — Institute of Nanostructure Technologies and Analytics, University of Kassel, 34132 Kassel, Germany

Optical spectroscopy has become one of the most prevalent characterization methods used in a wide array of field applications such as medical health-care. The most important challenge facing the construction of spectrometers is their miniaturization and integration into mobile devices. This pocket-size spectrometry will enable a long-time self-monitoring of the user's state of health in a non-invasive way.

Due to the fact that the miniaturization of grating-based spectrometers has reached its limits, they need to be replaced by novel approaches, e.g. by Fabry-Pérot (FP) based spectrometers combined with Nanoimprint Technology. We have successfully implemented a new methodology of fabricating miniaturized spectrometers (Nanospectrometers) with 3D filter-arrays of different cavity heights with high vertical resolution by only one single process step. For a detection of a broad spectral range, multiple DBRs (Distributed Bragg Reflectors) with different physical heights are obligatory. The novel Substrate Conformal Imprint Lithography (SCIL) affords to print on those cascade structured surfaces. Nanospectrometers, as fabricated at the INA, are low in cost, very robust and show a very high optical resolution (λ/Δλ) up to 500 and thus, having a great potential for the commercial market.