Dresden 2011 – scientific programme
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Q: Fachverband Quantenoptik und Photonik
Q 43: Laseranwendungen und Photonik 2
Q 43.1: Talk
Wednesday, March 16, 2011, 16:30–16:45, SCH A118
Photonic Crystal Halfhole-Microresonators on (220x450) nm SOI waveguides — •Bülent A. Franke1, Aws Al-Saadi1, Miroslaw Szczambura1, Sebastian Kupijai1, Shaimaa Mahdi1, Viachaslau Ksiandzou2, Sigurd Schrader2, Hans J. Eichler1, and Stefan Meister1 — 1Technische Universität Berlin, Institut für Optik und Atomare Physik, Berlin, Germany — 2Technische Fachhochschule Wildau, Institut für Plasma- und Lasertechnik, Wildau, Germany
1D-photonic crystal halfhole Fabry-Pérot resonator based on Silicon-on-Insulator technology (SOI) will be presented. The microresonators in SOI waveguides are created by sinusoidal modulation of the waveguide width to realize Bragg mirror sections. The mirror regions are separated by a sub-micron spacer. The microresonators are manufactured by DUV-Lithography (248 nm) in a CMOS environment with 130 nm resolution. The waveguides as well as the width modulated mirror regions are designed using a single mask and are fabricated in a shallow trench process. Filters with different halfhole diameters, cavity length, and mirror refectivity was produced and investigated. Q-factors of up to 1500 could be observed around 1550 nm wavelength with an insertion loss of 3 dB. The results will be discussed and compared and simulated.