Dresden 2011 – wissenschaftliches Programm

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TUT: Tutorials

TUT 4: State of the Art of X-Ray Microanalysis (MI)

TUT 4.1: Tutorium

Sonntag, 13. März 2011, 16:00–16:45, HSZ 401

Energy dispersive X-ray spectroscopy, from the method to the instrumentation — •Jana Berlin — Bruker Nano GmbH, Berlin, Germany

One of the most important interactions of beam and sample in the electron microscope is the generation of element-specific X-ray radiation. Energy dispersive X-ray spectrometry (EDS) uses semiconductor detectors to collect this radiation from the sample. "Energy-dispersive" means that the detector measures the relative abundance of emitted X-rays versus their energy. The signal can be evaluated both qualitatively (element identification) and quantitatively (element concentration in mass% or atom%). Spot measurements as well as one, two and nowadays even three-dimensional data acquisition are possible.

The instrumentation used for detection and analysis has made big advances within the past decade. Thermoelectrically cooled silicon drift detectors (SDD) have become state of the art technology, replacing liquid nitrogen cooled Si(Li) detectors. Properties and applications of the SDD technology in the analysis of different sample categories will be discussed to round off this tutorial.