Dresden 2011 – scientific programme

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 1: Cryogenic Vacuum Pumping

Monday, March 14, 2011, 10:00–11:00, HSZ 101

	10:00	VA 1.1	Invited Talk: Cryogenic pumping for the fabrication of highest-purity semiconductors — •Werner Wegscheider
	10:40	VA 1.2	The cryogenic vacuum system of SIS100 at FAIR — •Stefan Wilfert, Andreas Krämer, Holger Kollmus, Lars Bozyk, Hartmut Reich-Sprenger, Egbert Fischer, Anna Mierau, Seong Yeub Shim, and Jan-Patrick Meier