Dresden 2011 – scientific programme

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Gas Flow Simulation

VA 2.3: Talk

Monday, March 14, 2011, 11:40–12:00, HSZ 101

3d-neutralgas simulation for vacuum facilities — •Robert Henrich, Michael Bachmann, Davar Feili, and Christian Heiliger — I. Physikalisches Institut, Justus Liebig University Giessen, D-35392, Germany

We present a three-dimensional simulation program for molecular gas flows at low pressures (high/ultrahigh vacuum). This program is designed to simulate the neutral gas distribution in any vacuum chamber with a size of a few centimeters up to a few meters. This can be used to optimize the pumping and/or gas distribution system for different applications. The main feature of the program is its ability of importing any arbitrary surface geometry that can be created in a CAD- program. Thereby the geometry will be converted to triangles. Once the geometry is imported each surface region can be assigned with special properties. At the moment gas inlets and pumps can be simulated and also appointing a specific surface temperature and specular/diffuse reflection coefficient is supported. With the actual version it is possible to simulate the distribution of the neutral gas and the influence of different pump arrangements on it. Furthermore the simulation is possible to calculate the neutral gas molecular flow transmission coefficients for arbitrary formed tubes.