Dresden 2011 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 4: Vacuum Control and Monitoring

VA 4.2: Vortrag

Montag, 14. März 2011, 15:40–16:00, HSZ 101

Novel easy to handle method for vacuum systems control — •Dieter Müller — Oerlikon Leybold Vacuum GmbH, Köln, Germany

Vacuum systems consist of various pumps, gauges, and valves. For automation, control, and data collection these systems have to be integrated in a control that can either be based on a commercial software like 'Labview' or on a PLC. The time and effort for adaptation of hardware and programming is immense. Especially in experimental devices frequent changes of hardware are necessary and require time consuming new programming.

This paper presents a novel vacuum controller with an integrated pre-configured PLC. Components connected are automatically recognized. The initial wizard to configure the whole vacuum system including valves and process automation steps is passed in a few minutes. Later changes of hardware are either detected automatically or can be configured easily. Process data, system configuration, failure storage, and software updates are done via USB. Remote control is possible via Ethernet or via WLAN and an app for smartphones. The controller supplies all power to all valves, active gauges, single phase roughing pumps plus 3-phase roughing pumps via an additional e-box.