Kiel 2011 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 16: Poster: Niedertemperaturplasmen
P 16.14: Poster
Mittwoch, 30. März 2011, 16:30–18:30, Foyer
CC-RF discharge in CF4/H2: Simulation and experiment — •Gunnar Stoppa1,2, Sergey Stepanov1, Ralf Schneider1, and Jürgen Meichsner1 — 1Institut für Physik, Ernst-Moritz-Arndt Universität, Greifswald, Germany — 2Max-Planck-Institut für Plasmaphysik, Greifswald, Germany
CC-RF discharges in a CF4-hydrogen mixture are studied experimentally and with simulations. Measurements of transient and stable neutral species were performed using in-situ IR-TDLAS and FTIR-spectroscopy. Extensions of the experimental setup are planned to obtain informations on electrons (microwave interferometry, PROES) and ions (energy-resolved mass spectrometry). To understand the reaction dynamics in the discharge a 0D-code including 40 species with over 200 reactions was developed. Sensitivity studies using Monte Carlo techniques are done to analyse the dominant reaction pathes and error propagation of atomic and molecular data. Due to the importance of wall processes additional Molecular Dynamics studies for the interaction of neutral and ion spiecies with deposited C-H-F films using a REBO-potential are performed. We expect to obtain better understanding of the fundamental interaction of plasma and wall, including break up patterns, reflection and sticking coefficients. Depending on the ability of experimental characterisation development of a PIC plasma model is envisaged.