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P: Fachverband Plasmaphysik

P 7: Poster: Modellierung und Simulation von Niederdruckplasmen

P 7.3: Poster

Dienstag, 29. März 2011, 17:00–19:00, Foyer

Current-voltage characteristics of nonharmonically modulated plasma boundary sheaths — •Abd T. Elgendy, Ralf Peter Brinkmann, and Haimoun Hatefinia — Lehrstuhl für Theoretische Elektrotechnik, Ruhr-Universität Bochum

The dynamics of capacitively coupled RF-discharges is largely dominated by the charge-voltage characteristics of the plasma bouandry sheath, which in turn is dependent on the characteristcs of the modulation. This contribution focuses on the behavior of the sheath under non-harmonic excitations, such as two-frequency and pulse-like excitation. Mathematical models of different complexety and computational efficiency will be established and compared.