Kiel 2011 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 9: Poster: Diagnostik technischer Plasmen
P 9.11: Poster
Dienstag, 29. März 2011, 17:00–19:00, Foyer
Micro-particles as calorimetric probes in a low-pressure rf-discharge — •Horst R. Maurer1, Ralf Basner2, and Holger Kersten1 — 1Institut für Experimentelle und Angewandte Physik, Christian-Albrechts-Universität zu Kiel, D-24098 Kiel — 2Leibniz-Institut für Plasmaforschung und Technologie e.V.
Today, plasma-based synthesis and modification of powder with specific properties offers a variety of new applications, e.g. the improvement of optical or mechanical properties for coatings, of sintering materials, disperse composite catalysts or polymorphous solar cells. In general, the energetic conditions at the surface of a substrate are crucial for the improvement of such applications with respect to morphology and stoichiometry of grown layers and to process rates. Hence, monitoring and controlling the constitutional parameters like gas pressure and composition or substrate temperature are essential, and understanding the plasma-surface interaction plays a key role in the design of the process conditions and can also give access to a general improvement in the understanding of plasma-particle interaction.
In the presented work, systematic particle temperature measurements are performed in argon and gas mixtures. An energy balance at low pressures in argon can be consistently described within the whole parameter range by a simple model. According to this, the fundamental process for particle heating is the result from the recombination of electrons and ions at the particle surface. Moreover, in argon-hydrogen mixtures another fundamental energy source for particle heating is the recombination of dissociated hydrogen at the particle surface.