Kiel 2011 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 9: Poster: Diagnostik technischer Plasmen

P 9.14: Poster

Dienstag, 29. März 2011, 17:00–19:00, Foyer

Space and time resolved Langmuir probe measurements in a HIPIMS discharge — •Patrick Wiener, Ante Hecimovic, Marc Böke, and Jörg Winter — Institut für Experimentalphysik II , Ruhr-Universität Bochum, 44780 Bochum

High power impulse magnetron sputtering (HIPIMS) is a recently developed IPVD (ionized physical vapour deposition) technique, based on a dc-magnetron discharge. HIPIMS is a pulsed DC discharge characterized by high peak power density of several kW, low pulse frequencies (<1 000 Hz), and pulses of a few hundreds of microseconds. In this study, we investigate the temporal and spatial evolution of the plasma parameters: electron density, mean electron temperature, plasmapotential, floating potential and EEDF during the pulse and in the afterglow. A cylindrical Langmuir probe is used to measure the evolution of the plasma parameters. The HIPIMS discharge was run on a titanium target in an argon atmosphere. In earlier works it has been seen, that by using the HIPIMS technique, very high electron densities (up to 10e18m-3) and mean electron energies of up to 3.5eV can be obtained during the pulse. Further it has been seen, that due to the high densities, maxwellianization of the druyvesteyn like EEDF takes place. The evolution of electron density was investigated to show a decay with apparently two different time constants. In order to investigate the behaviour of these effects, characteristics are recorded, varying working parameters such as gas pressure, power, pulse length and frequency.