Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
P: Fachverband Plasmaphysik
P 9: Poster: Diagnostik technischer Plasmen
P 9.17: Poster
Dienstag, 29. März 2011, 17:00–19:00, Foyer
Time resolved laser absorption spectroscopy for Ar* density and temperature in pulsed magnetron discharge — •Hoang Tung Do1, Martin Cada2, Vladimir Sushkov1, Zdenek Hubicka2, and Rainer Hippler1 — 1Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany — 2Institute of Physics, Academy of Science of the Czech Republic, Na Slovance 2, 182 21 Praha 8, Czech Republic
Time resolved Ar metastable density and temperature were measured in High Power Impulse Magnetron Sputtering and conventional magnetron discharges with titanium target. Both metastable density and temperature variations feature a two peak structure, one in the pulse and the other in the afterglow. However, we found a noticeable difference between them. The temperature peak in the on-phase appears after the density peak, while the behavior is inverse in the off-phase. This is due to the difference in production mechanisms of metastable. In the pulse, metastable atoms are excited from ground state atoms (cold) by electron impact excitation. But after the termination of the pulse, they are generated from ions (hot) by recombination processes. The temporal variation of metastable density was also modeled using plasma parameters taken from Langmuir probe measurement.