Berlin 2012 – wissenschaftliches Programm
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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 17: Poster: Crystallisation, Nucleation and Self assembly
CPP 17.16: Poster
Dienstag, 27. März 2012, 18:15–20:15, Poster A
From atoms to layer: growth kinetics during sputter deposition observed via in-situ GISAXS — •Matthias Schwartzkopf1, Mottakin M. Abul Kashem1, Gunthard Benecke2, Adeline Buffet1, Denise Erb1, Berit Heidmann1, Gerd Herzog1, Volker Körstgens3, Ezzeldin Metwalli3, Jan Perlich1, André Rothkirch1, Kai Schlage1, Peter Müller-Buschbaum3, Ralf Röhlsberger1, Rainer Gehrke1, and Stephan V. Roth1 — 1DESY, Notkestr. 85, D-22607 Hamburg — 2MPIKG, Dep. Biomat., Am Mühlenberg 1, D-14424 Potsdam-Golm — 3TU München, Physik Department E13, James-Franck-Str. 1, D-85748 Garching
For an efficient and controllable production of active nanostructured surfaces, sputter deposition plays a very important role in industrial processing [1]. In order to tune the unique size-dependent optoelectronic and catalytic properties of gold clusters, it is mandatory to know, how the growth kinetics influences the metal film morphology during sputter deposition. We therefore investigate in-situ growth kinetics of gold during sputter deposition by grazing incidence small-angle-X-ray scattering (GISAXS). The high time resolution allows determining the growth kinetics of the initial nucleation and the subsequent 2D self-assembly of clusters at industrial deposition rates. The temporal evolution of the structural parameters reveals four general stages of gold cluster growth. We show that each stage is characterized by a predominant surface process and its intrinsic kinetics.
[1] Faupel et al., Adv. Eng. Mat. 12, 1177 (2010)