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DS: Fachverband Dünne Schichten

DS 14: Ion irradiation effects

DS 14.4: Vortrag

Dienstag, 27. März 2012, 12:30–12:45, H 0111

In-Situ Analysis of Nanostructures Induced by Slow Highly Charged Ions — •Richard A. Wilhelm, René Heller, and Stefan Facsko — Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

The sum of the binding energies of all missing electrons (potential energy) of highly charged ions can induce surface modifications on the nanometer scale. We present results of a set-up for slow highly charged ion irradiations and scanning probe microscopy studies under in-situ conditions. A Dresden-EBIT is used to provide ions of different species with charge states up to q=40 (e.g. for Xe). An electrostatic deceleration lens system allows to vary the kinetic energies of the ions in the range of 10eV· q up to 5keV· q. Furthermore, we studied surface nanostructures on various substrates by an Omicron ultra high vacuum (UHV) scanning probe microscope, which is directly connected to the ion source. The size and the shape of nanostructures created by the deposition of potential energy and analyzed in-situ under UHV conditions are discussed and compared to those observed by recent studies under ex-situ conditions.