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DS: Fachverband Dünne Schichten

DS 28: Thin film characterization: structure analysis and composition (Spectroscopy)

DS 28.2: Vortrag

Mittwoch, 28. März 2012, 18:00–18:15, H 2032

Quantitaive and wavelenght dispersive x-ray fluorescence spectrometry of buried nanostructures — •Rainer Unterumsberger, Beatrix Pollakowski, Falk Reinhardt, Matthias Müller, and Burkhard Beckhoff — Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany

Quantitative X-Ray Fluorescence (XRF) spectrometry with synchrotron radiation is a well-established method for thickness determination of thin layers. The combination of Grazing Incidence X-Ray Fluorescence (GIXRF) and XRF spectrometry enables the possibility of near surface quantification of lowest depositions as well as buried nanolayer quantification. In this work quantitative XRF and GIXRF was compared and the advantages and limits of both methods will be presented. The sample systems consist of buried boron-carbon nanolayers varying in thickness and covered with 2.5 nm silicon dioxide. In addition, some of these sample systems were analyzed by X-Ray Emission Spectrometry (XES) employing a wavelength dispersive spectrometer combined with a refocussing optic optimised for a high detection efficiency, which allows for the investigation of buried nanolayers. This method will be used for the investigation of the chemical speciation and the impact of the chemical state on atomic fundamental parameters, which are relevant for the reliabilty of the thickness determination employing XRF.