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Berlin 2012 – scientific programme

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DS: Fachverband Dünne Schichten

DS 30: Thin film characterization: structure analysis and composition (TEM, LEED, PAS)

DS 30.5: Talk

Thursday, March 29, 2012, 10:30–10:45, H 0111

Interdiffusion in Au/Cu thin films studied by depth dependent CDBS — •Markus Reiner1, Philip Pikart1,2, and Christoph Hugenschmidt1,21TU München, Physik-Department, Lehrstuhl E21 — 2TU München, ZWE FRM II

The non-destructive positron annihilation spectroscopy (PAS) with the monoenergetic positron beam at NEPOMUC allows the investigation of thin film samples. As model system, a couple of a vapor deposited Au film (180 nm) on top of a Cu film (480 nm) on a Si substrate was studied by coincident Doppler broadening spectroscopy (CDBS), which is sensitive to the chemical vicinity of the annihilation site on an atomic scale. Depth dependent and time-resolved measurements showed that the experimentally observed signature of the gold film completely vanished after a heating cycle of several hours (maximum temperature of 415 °C). Ab-initio calculations of various AuCu-alloys confirmed the interpretation that a homogeneous AuCu layer was formed on top of the Cu film.

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