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DS: Fachverband Dünne Schichten
DS 37: Poster II: Focused electron beam induced processing for the fabrication of nanostructures (focused session, jointly with O); Nanoengineered thin films; Layer properties: electrical, optical, and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM, XPS, SIMS, RBS,..); Application of thin films
DS 37.4: Poster
Thursday, March 29, 2012, 15:00–17:00, Poster E
New Developments in MAD Technique: Layer-By-Layer Growth of Thin Oxide Films and Superlattices — •Camillo Ballani1, Sebastian Hühn1, Markus Jungbauer1, Markus Michelmann1, Felix Massel1, Oleg Shapoval2, Alexander Belenchuk2, and Vasily Moshnyaga1 — 1I. Physikalisches Institut, Georg-August-Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany — 2Institute of Applied Physics, Academiei str. 5, MD-2028 Chisinau, Moldova
Metalorganic aerosol deposition (MAD) technique1 was shown to be very advantageous in preparation of thin films of complex functional oxides, like cuprates, manganites, titanites. Due to their unique bulk and interfacial electronic/structural properties these strongly correlated oxides are recently in the focus of fundamental and applied research, including large scale research cooperation within the EU FP 7 Framework. We report here further MAD developments toward the in-situ growth control via optical ellipsometry and atomic layer deposition (MAD-ALD). The results on the structure and magnetotransport of individual layer-by-layer grown thin films (LSMO, BSTO) as well as of superlattices (LCMO/PCMO, LBMO/LMO, LCMO/BTO) will be presented and discussed with the main focus on the optimization of colossal magnetoresistance and artificial multiferroic behavior by means of electronic and/or structural interface engineering. Financial support from EU FP 7 IFOX (interfacing oxides) is acknowledged. 1Appl. Phys. Lett. 74, 1842 (1999).