Berlin 2012 – scientific programme

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DS: Fachverband Dünne Schichten

DS 38: Poster III: Resistive switching (jointly with DF, KR, HL); Thermoelectric materials (Focused session); Micro- and nanopatterning (jointly with O); Ion irradiation effects

DS 38.27: Poster

Thursday, March 29, 2012, 17:30–19:00, Poster E

Saturation of Plastic Deformation by Swift Heavy Ion Irradiation: Ion Hammering vs. Surface Effects — •Redi Ferhati¹, Knut Dautel¹, Monika Fritzsche², and Wolfgang Bolse¹ — ¹Institut für Halbleiteroptik und Funktionelle Grenzflächen, Universität Stuttgart — ²Helmholtz-Zentrum Dresden-Rossendorf

Swift heavy ion (SHI) induced plastic deformation is a subject of current research and scientific discussion. This *Ion Hammering* phenomenon was first observed 30 years ago in amorphous materials like metallic glasses [1]. About 10 years ago, Feyh et al. [2] have shown that stress generation and *Ion Hammering* result in self-organization of thin NiO-films on Si-wafers into a sub-micron lamellae-like structure under grazing angle irradiation. The growth of the lamellae was found to saturate as soon as they have reached a thickness of a few hundreds of nm. Here we will show our latest results on the restructuring of pre-patterned thin oxide films by SHI under various irradiation conditions. The experiments were performed by employing (in-situ) scanning electron microscopy [3], and were complemented by (in-situ) energy dispersive x-ray analysis and atomic force microscopy. As we will show, the saturation behavior can be understood as a competition of *Ion Hammering* and surface energy effects, while the unexpected fact, that the initially crystalline films undergo *Ion Hammering* can possibly be attributed to oxygen loss and thus amorphization during irradiation. [1] S.Klaumünzer et al., Phys. Rev. Lett. 51 (1983), [2] W. Bolse et al., Appl. Phys. A77 (2003), [3] S. Amirthapandian et al., Rev. Sci. Instr. 81 (2010)