Berlin 2012 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 38: MagneticThin Films I
MA 38.9: Vortrag
Donnerstag, 29. März 2012, 11:45–12:00, H 0112
Fe32Co44Hf12N12/TiN multilayer coatings for non-contact high frequency sensor applications — •Kathrin Krüger, Klaus Seemann, Harald Leiste, Michael Stüber, and Sven Ulrich — Karlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM-AWP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
In mechanical engineering the use of wear resistant PVD coatings is well established to enhance the durability of tools and components. In order to avoid interruptions of the working flow, a contactless observation of the wear state of surfaces and coatings would be beneficial. With regard to the dependence of ferromagnetic magnetization on temperature or strain, a wear resistant coating with an embedded ferromagnetic phase is realized as a potential functional thin film sensor and wear resistant material. In this study the ferromagnetic properties of FeCoHfN layers were combined with the mechanical properties of TiN layers in Fe32Co44Hf12N12/TiN multilayer coatings to simultaneously develop and tailor the magnetic and mechanical properties.
In order to investigate the effect of interfaces and individual layer thickness on the ferromagnetic high frequency permeability and on selected mechanical properties, the number of bilayers was varied systematically while keeping the total thickness and the ratio of the single layer thicknesses constant. It will be shown that the material selection and the specific multilayer design provide good magnetic softness and cut-off frequencies above 2 GHz. Low residual stresses and high hardness values, similar to the hardness of TiN, can be achieved.