Berlin 2012 – wissenschaftliches Programm

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MI: Fachverband Mikrosonden

MI 3: Scanning probe microscopy

MI 3.3: Vortrag

Montag, 26. März 2012, 13:15–13:30, EMH 225

All-Metal Cantilevers for Kelvin Force Microscopy — •Raul D. Rodriguez, Franziska Lüttich, Susanne Müller, Daniel Lehmann, and Dietrich R. T. Zahn — Semiconductor Physics, Chemnitz University of Technology, Reichenhainer Str. 70. Chemnitz, 09126, Germany

Kelvin force microscopy (KFM) has become a key analytical technique in several research areas from organic optoelectronic devices to single biomolecular interactions. Ultra sharp, wear-proof, electrical conductors and tapping-mode compatible are key characteristics of cantilevers for KFM. In this work we introduce a new class of all-metal cantilevers that meet all the requirements mentioned above. From metallic microwires as precursors gold and silver probes have been fabricated using a dedicated device for tip fabrication which enhances reproducibility and control of the cantilever dimensions. The resonance frequency of the cantilevers could be tuned in a range from 10 to 400 kHz in air. Such probes were characterized by scanning electron microscopy and their performance was evaluated by analyzing organic semiconductor devices and commercial probe characterizers. The advantages and limitations of these novel probes are discussed and compared to conventional metal-coated silicon and silicon nitride cantilevers.