Berlin 2012 – wissenschaftliches Programm
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MI: Fachverband Mikrosonden
MI 5: X-ray spectrometry and analysis of works of art
MI 5.7: Vortrag
Mittwoch, 28. März 2012, 12:00–12:15, TA 201
Advanced light element and low energy X-ray analysis of ceramics and ceramic-metal joints using SEM/EDX with Silicon Drift Detectors (SDD) — •Tobias Salge1, Orkun Tunckan2, Ralf Terborg1, Vasile-Dan Hodoroaba3, and Servet Turan4 — 1Bruker Nano GmbH, Berlin, Germany — 2Civil Aviation School, Anadolu Univ., Turkey — 3BAM, Berlin, Germany — 4Materials Science and Engineering Dept., Anadolu Univ., Turkey
An analytical aspect in EDX analysis of massive samples is to lower the spatial resolution. This makes it necessary to work with low excitation voltages to decrease the excitation volume for generated X-rays and evaluate low energy X-ray lines. In order to separate overlapping peaks, the line deconvolution algorithms incorporated into the EDX software are of crucial importance. Two representative samples will be discussed: (1) a sintered hard ceramic composed of three major phases TiB2, TiC, and SiC and (2) a Si3N4-Ti joint with a heterogeneously composed reaction layer [1]. This study demonstrates that state-of-the-art hardware in combination with modern data processing allows advanced spectrum imaging of light elements and low energy X-ray lines. Element distribution of overlapping lines at the low energy range (e.g. Ti-L, N-K) can be analyzed on the sub-micro scale by EDX in a short time by peak deconvolution. Even at low impulse statistics, spectra containing low energy lines can be accurately quantified.
References: [1] O. Tunckan (2010) Ph.D thesis. Anadolu University, Eskişehir, Turkey, 176 p. [2] Dr. R. Wäsche (BAM) is gratefully acknowledged for producing the hard ceramic sample.