Berlin 2012 – wissenschaftliches Programm
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MI: Fachverband Mikrosonden
MI 8: Poster – Microanalysis and microscopy
MI 8.14: Poster
Mittwoch, 28. März 2012, 15:00–17:30, Poster E
Towards a deeper understanding of the dynamic properties of cantilever probes — •Maria-Astrid Schröter1, Christiane Weimann1, and Heinz Sturm1,2 — 1BAM - Federal Institute for Materials Research and Testing, Division 6.2, Unter den Eichen 87, 12205 Berlin, Germany — 2Technische Universität Berlin, Pascalstraße 8-9, 10587 Berlin, Germany
In this poster a first step to measure and understand the dynamics of small and weak mechanical structures with ultra-high precision and sensitivity is presented. For this reason we analyze different types and geometries of silicon cantilevers with a special focus on T-shaped cantilevers. These cantilevers have an off-axis tip, so that tip-sample forces excite torsional vibrations.
For dynamic measurement of very small vibrating structures a hybrid of a Scanning Electron Microscope (SEM) and a Scanning Force Microscope (SFM) is used. One of the most obvious advantages using a combined system is that complementary analysis can be made at exactly the same sample position.
With the setup used here images of vibrating SFM cantilevers are presented to demonstrate the technique and to show, that torsional and flexural resonances can be distinguished. Beside DC-Type SE-signal, images of the superimposed AC-modulation as amplitude/phase shift and real/imaginary part amplitudes can be obtained using a lock-in amplifier synchronized to the excitation frequency. The analysis of vibrating structures includes several modes in the normal and torsional direction.