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MI: Fachverband Mikrosonden

MI 8: Poster – Microanalysis and microscopy

MI 8.15: Poster

Mittwoch, 28. März 2012, 15:00–17:30, Poster E

Beams of Highly Charged Ions for Micrometer Surface Structuring and Analysis — •Mike Schmidt¹, Günter Zschornack², Vladimir Ovsyannikov¹, and Jacques Gierak³ — ¹DREEBIT GmbH, Zur Wetterwarte 50, 01109 Dresden — ²TU Dresden, Helmholtzstr. 10, 01069 Dresden — ³LPN/CNRS, 91460 Marcoussis, France

The particular properties of highly charged ions yield an interesting application potential in the field of micrometer surface structuring and analysis. Investigating these properties a demonstration setup was commissioned and is operated by a consortium of the Technische Universität Dresden and the DREEBIT GmbH in cooperation with the Helmholtz Zentrum Dresden-Rossendorf e.V. The setup features an ion source for highly charged ions (DRESDEN EBIS) on a Focused Ion Beam column which is connected to a target chamber with target transfer and positioning system for ion irradiation experiments. Accomplished investigations and experiments are presented. The work is supported by the EFRE fund of the EU and by the Freistaat Sachsen (Projects 100074113 and 100074115).