Berlin 2012 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 47: Topical Session Modern Atom Probe Tomography III - Functional and Nanostructured Materials

MM 47.1: Topical Talk

Donnerstag, 29. März 2012, 10:15–10:45, H 0107

Methods in Correlative Tomography for the Nanometer Regime — •Stephan S.A. Gerstl Gerstl, Elisabeth Mueller, Miriam Lucas, and Roger Wepf — EMEZ Center for Electron Microscopy, ETH Zurich, Switzerland

Tomographic methods in materials science have experienced a surge in interest, since observing nature including the third spatial dimension provides significantly more insight than techniques interrogating surfaces or viewing projections of materials. In this paper we discuss a variety of methods we are investigating not only to correlate 3-D images between microscopes, but extend combinatorial techniques to including the correlation between analytical information of chemistry and crystallography. Basic correlations between Atom Probe Tomography (APT) and HRSEM images can reveal geometric input for reconstructions. More direct chemical correlations are feasible between STEM and APT. Methods we will discuss to achieve the spatial and chemical correlations involve modified TEM specimens and well known pillar geometries. Examples from both nanostructured metal and semiconductor type materials will be presented.