Berlin 2012 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
O: Fachverband Oberflächenphysik
O 35: Poster Session II (Polymeric biomolecular films; Nanostructures; Electronic structure; Spin-orbit interaction; Phase transitions; Surface chemical reactions; Heterogeneous catalysis; Particles and clusters; Surface magnetism; Electron and spin dynamics; Surface dynamics; Methods; Electronic structure theory; Functional molecules)
O 35.107: Poster
Dienstag, 27. März 2012, 18:15–21:45, Poster B
Thermal Scanning Probe Lithography: Progress and Applications — •Felix Holzner1,2, Philip Paul1, Cyrill Kuemin1,2, Ute Drechsler1, James L. Hedrick3, Heiko Wolf1, Nicholas Spencer2, Urs Duerig1, and Armin Knoll1 — 1IBM Research, Rueschlikon, Switzerland — 2Laboratory of Surface Science and Technology, ETH Zurich, Switzerland — 3BM Research, Almaden, USA
The presented poster summarizes our recent advances in Thermal Scanning Probe Lithography with polyphthalaldehyde (PPA) as resist material. The polymer responds to the presence of a hot tip by depolymerization and local desorption. Thereby arbitrarily shaped patterns in the form of topographic reliefs can be written.
Patterning speeds with up to 500000 pixels/s and a positioning error of less than 10 nm at 10 mm/s scan speed were achieved. The written reliefs were imaged with the same cantilever with similar scan speeds leading to short fabrication turn-around times. In addition, we show that it is possible to use the surface roughness of the polymer films as fingerprints for the alignment of subsequently written patterns. The method achieves a stitching accuracy of <5 nm.
First applications shown on the poster include "Ultra long-term data preservation" and "Removable templates for directed placement of gold nanorods".
[1] Holzner et al., Nano Letters, 2011, 11, 3957-3962 [2] Paul et al., Nanotechnology, 2011, 22, 275-306 [3] Knoll et al., Advanced Materials, 2010, 22, 3361-3365 [4] Holzner et al., Appl. Phys. Lett., 2011, 99, 023110 [5] Pires et al., Science, 2010, 328, 732