Berlin 2012 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 35: Poster Session II (Polymeric biomolecular films; Nanostructures; Electronic structure; Spin-orbit interaction; Phase transitions; Surface chemical reactions; Heterogeneous catalysis; Particles and clusters; Surface magnetism; Electron and spin dynamics; Surface dynamics; Methods; Electronic structure theory; Functional molecules)
O 35.18: Poster
Dienstag, 27. März 2012, 18:15–21:45, Poster B
Sensitive gas sensor device obtained from the combination of 3D surface nano-patterns technique with atomic layer deposition — Zhibing Zhan1,2, Yan Mi1,2, Hui Sun1,2, Fabian Grote1,2, Huaping Zhao1,2, and •Yong Lei1,2 — 1Fachgebiet 3D-Nanostrukturierung, Institut für Physik & Zentrum für Mikro- und Nanotechnologien (ZIK MacroNano), Technische Universität Ilmenau, 98693 Ilmenau, Germany — 2Institut für MaterialPhysik, Westfälische Wilhelms-Universität Münster, 48149 Münster, Germany
Combined atomic layer deposition (ALD) with an innovative three-dimensional (3D) surface nano-structuring technique, ultrathin alumina membranes (UTAMs), we obtained a gas sensor device with sensitivity reaching PPB level to NO2. To our knowledge, this value has not been reported before for commercial gas sensors. Due to the characteristic of high regularity and controllability from ALD and our 3D nano-patterns technique, it is feasible to investigate the surface chemistry and physics, and hence to optimize the parameters of the gas sensor device. Our method used to prepare this gas sensor device is compatible to semiconductor device industry, which exhibit tremendous application potentials in the fields of environmental protection and atmospheric quality monitoring.