Berlin 2012 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 91: [MA] Poster II
O 91.35: Poster
Freitag, 30. März 2012, 11:00–14:00, Poster A
Rolled-up tubes and cantilevers from magnetic SrRuO3-Pr0.7Ca0.3MnO3 films — Christoph Deneke1,4, •Kathrin Dörr2, Elisabeth Wild3, Stefan Baunack3, Angelo Malachias4, and Oliver Schmidt3 — 1Laboratorio Nacional de Nanotecnologia, Caixa Postal 6192, Campinas, S.P., Brazil — 2MLU Halle-Wittenberg, Halle, Germany — 3Institute for Integrative Nanosciences, IFW Dresden, Dresden, Germany — 4Laboratorio Nacional de Luz Sincrotron, Caixa Postal 6192, Campinas, S.P., Brazil
Three-dimensional microobjects are fabricated by the controlled release of inherently strained SrRuO3/Pr0.7Ca0.3MnO3/SrRuO3 trilayers from SrTiO3(001) substrates. Cantilevers and rolled-up microtubes with a diameter of 6-8 µm are demonstrated. The etching behavior of the SrRuO3 film is investigated and a selectivity of 1:9100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by x-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, microdiffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.