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P: Fachverband Plasmaphysik

P 13: Poster: Niedertemperaturplasmsen

P 13.18: Poster

Dienstag, 13. März 2012, 16:30–19:00, Poster.III

Simulation and measurements of an inductively coupled hydrogen plasma for sterilization processes — •Max Engelhardt¹, Benjamin Denis¹, Tim Styrnoll¹, Nikita Bibinov¹, Thomas Mussenbrock², and Peter Awakowicz¹ — ¹Lehrstuhl für Allgemeine Elektrotechnik und Plasmatechnik, Ruhr-Universität Bochum — ²Lehrstuhl für Theoretische Elektrotechnik, Ruhr-Universität Bochum

Usability of plasmas for sterilization of medical devices is numerously investigated [1]. Especially sterilization of heat-sensitive materials is an advantage of plasma based sterilization. In order to generate a broad VUV spectrum, a hydrogen discharge can be used. Aim of this work is to simulate a hydrogen discharge in a double inductively coupled plasma (DICP) reactor. The simulation computes density distributions and surface fluxes of species in the discharge. This gives insight in not only the quantity of produced radiation, but also allows a calculation of heat flux onto the sterilized object. The simulation is done with the Hybrid Plasma Equipment Model (HPEM) [2]. The results of the simulation are verified with experimental data measured with a Langmuir probe system [3], which can record spatially resolved electron density and electron temperature. Additionally, measurements with optical emission spectroscopy are done and compared to corona model calculations from the simulation. [1] H Halfmann et al., J. Phys. D: Appl. Phys. 40 (2007) 4145-4154 [2] M Kushner, J. Phys. D: Appl. Phys. 42 (2009) 194013 [3] P Scheubert et al., 2001, J. Appl. Phys. 90 587