Stuttgart 2012 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 15: Poster: Theorie/Modellierung

P 15.19: Poster

Mittwoch, 14. März 2012, 16:30–19:00, Poster.III

Nonlinear dynamics of RF sheath: a kinetic self-consistent boundary sheath model matched to an experiment — •Mohammed Shihab¹, Marina Prenzel², Achim von Keudell², and Ralf Peter Brinkmann¹ — ¹Ruhr-University Bochum, Institute for Theoretical Electrical Engineering, D-44780 Bochum, Germany — ²Research group Reactive Plasmas, Ruhr-University Bochum, D-44780 Bochum, Germany

Fully arbitrary waveforms of the applied RF enable tailoring of the ion energy distribution function (IEDF) for particular purposes, such as etching selectivity, film crystallinity, etc. In this contribution, we match a kinetic self-consistent boundary sheath model to an experiment. However, not the well-known particle-in-cell (PIC) scheme is employed but a novel iterative algorithm termed "ensemble-in-spacetime" (EST). Our code allows to calculate the ion and neutral energy and angle distribution at the substrate behind the sheath (as well as the field distribution within the sheath) in about 1 % of the CPU time of a comparable PIC simulation. In the experiment: Al₂ O₃ films are biased with arbitrary waveforms and the films growth is studied. During the experiment, the plasma parameters are measured to be used as input parameters for the model. A qualitative comparison between the calculated IEDF and the films growth will be done to reveal the role of the ion energy in the film growth. The financial support from the Federal Ministry of Education and Research within the frame of the project "Plasma Technology Grid" and the support of the DFG via the collaborative research center SFB-TR87 is gratefully acknowledged.