Stuttgart 2012 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 20: Poster: Diagnostik

P 20.13: Poster

Donnerstag, 15. März 2012, 16:30–19:00, Poster.III

Comparison of collisional-radiative models for electron density and temperature determination by OES in ICP and CCP discharges — •Sarah Siepa, Yusuf Celik, Beilei Du, Steffen Marius Meier, Tsanko Vaskov Tsankov, Dirk Luggenhölscher, and Uwe Czarnetzki — Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany

Optical emission spectroscopy (OES) is a non-intrusive and easily realizable method but requires collisional-radiative (CR) models to extract the plasma parameters from the measured spectra. For argon several CR-models exist in the literature ranging from rather simple corona-like to more complex models with variable EEDFs. In this work two distinct models have been used to determine the electron density and temperature in a capacitively and inductively coupled argon discharge in a GEC RF reference cell as well as in a dense magnetic multipole ICP discharge, thus covering a wide range of plasma densities. The results are compared to those of Langmuir probe measurements and Terahertz spectroscopy. The applicability and the validity of the investigated models are discussed.