Stuttgart 2012 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 20: Poster: Diagnostik

P 20.15: Poster

Donnerstag, 15. März 2012, 16:30–19:00, Poster.III

Determination of electron density using the multipole resonance probe as a monitoring- and diagnostic system in diffrent types of technological plasmas — Tim Styrnoll¹ and •The MRP-Team² — ¹Institute for Electrical Engineering and Plasma Technology, Ruhr-University Bochum, Universitaetsstrasse 150, Building ID, Room 1/517, 44801 Bochum, Germany — ²Department for electrial engineering, Ruhr-University Bochum

The MRP was recently proposed as an economical and industry-compatible plasma device. The MRP belongs to the family of active plasma resonance spectroscopy, which uses the general ability of plasmas to resonate on or near the electron plasma frequency. The probe consists of two metallic hemispheres, mounted on a thin holder that also serves as balancing unit for an unbalanced signal. A network analyzer feeds the probe with an rf-signal and measures the absorption spectra (S11-parameter) in the range of 100 MHz to 10 GHz. The probe is encased in a quartz-tube. Due to spherical and electrical symmetry we are able to obtain algebraic expressions for the resonance frequencies and thus evaluation schemes for electron density and -temperature. This work shows MRP measurements in different technological plasma applications, which all show clearly interpretable absorption spectra, independent of the excitation type (icp, ccp, micro-wave, aps-pro), gas mixture or dielectric deposition layer on the encapsulation. Furthermore two concepts are implemented: i) MRP used as a monitoring system, mounted at a fix position for time-resolved measurements and ii) used as a diagnostic system, to measure spatial-resolved profiles.