Jena 2013 – scientific programme

Parts | Days | Selection | Search | Updates | Downloads | Help

P: Fachverband Plasmaphysik

P 10: Poster: Plasmadiagnostik

P 10.12: Poster

Wednesday, February 27, 2013, 16:30–18:30, Poster EG

A novel Diagnostic System based on the Concept of the Multipole Resonance Probe — •Tim Styrnoll¹ and MRP Team² — ¹Institute for Electrical Engineering and Plasma Technology, Ruhr-University Bochum, Universitaetsstrasse 150, Building ID, Room 1/517, 44801 Bochum, Germany, styrnoll@aept.rub.de — ²Department for Electrical Engineering and Information Technology, Ruhr-University Bochum

The MRP was recently proposed as an economical and industrially-compatible plasma device. Therefore the device must be i) robust and stable, ii) insensitive against perturbation of the process, iii) itself not perturbing the process, iv) clearly and easily interpretable without the need of calibration, v) compliant with the requirements of process integration and last not least, vi) economical in terms of investment, footprint and maintenance. The multipole resonance probe (MRP) is diagnostic based on the idea of active resonance spectroscopy. This idea dates back to the early days of discharge physics and uses the ability of every plasma to resonate on or near the electron plasma frequency, which is related to the electron density, -temperature and -collision frequency. These parameters can be used to supervise/monitor and characterize technological plasmas. This work shows MRP measurements, taken with a newly developed electronic measurement device leaving no need for an expensive network-analyzer.