Jena 2013 – scientific programme
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P: Fachverband Plasmaphysik
P 10: Poster: Plasmadiagnostik
P 10.1: Poster
Wednesday, February 27, 2013, 16:30–18:30, Poster EG
Measurement of ion velocity distributions (IVDFs) of mass selected nano-sized cluster ions — •Marina Ganeva1, Andrei Pipa2, and Rainer Hippler1 — 1Institut für Physik, Universität Greifswald, Felix-Hausdorff-Str. 6, 17487 Greifswald — 2Leibniz-Institut für Plasmaforschung und Technologie e.V., Felix-Hausdorff-Str. 2, 17489 Greifswald
Clusters with a size of 1--10 nm have a wide range of applications. Since the velocity of clusters determines the cluster-surface interaction mode, it significantly influences the deposition process and, hence, characteristics of the deposited film. The present work reports the measurements of the velocity distribution of mass selected nanoclusters. A quadrupole mass filter (QMF) in connection with a retarding field analyzer (RFA) has been employed. The challenge related to the detection of a very low cluster ion signal is overcome by the use of QMF detection plates as an RFA controlled by an external sourcemeter. The velocity distribution functions for copper cluster ions with a size in the range of 5--10 nm range were measured. The IVDFs of positively and negatively charged clusters are presented. The results show that the measured IVDFs can be fitted by a Maxwell velocity distribution for a single direction (Gauss function). For cluster ions of size 5 nm two groups with different most probable velocity were observed.