Jena 2013 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 19: Poster: Theorie und Modellierung
P 19.12: Poster
Donnerstag, 28. Februar 2013, 14:00–16:00, Poster EG
Study of the influence of surface properties in fluid modelling of low pressure CCRF discharges in oxygen — •Igor Sheykin1, Markus M. Becker1, Kristian Dittmann2, Christian Küllig2, Jürgen Meichsner2, and Detlef Loffhagen1 — 1INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald — 2Institute of Physics, University of Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald
Capacitively coupled radio frequency (CCRF) oxygen plasmas are widely used for surface treatment applications. Plasma discharges in a configuration with plane parallel electrodes separated by 2.5 cm have been performed using a time-dependent, spatially one-dimensional fluid model. The coupled system of Poisson's equation, balance equations for the densities of 17 heavy particle species and electrons as well as the electron energy balance equation taking into account about 180 collision processes in the reactive scheme has been solved to trace the spatiotemporal discharge behaviour of the periodic state of CCRF oxygen plasmas at 30 Pa. In the present contribution, the influence of the surface properties, such as secondary electron emission by ion impact and reflection of metastable molecules at the electrodes, on the discharge characteristics has been studied for applied voltages in the range from 200 to 1000 V. In particular, the impact on the density of electrons and negative ions and on the excitation of atomic oxygen has been analysed. Significant changes of the discharge behaviour have been found when varying the reflection coefficients. A comparison of modelling results with experimental data is represented and discussed.
The work has been supported by DFG CRC/Transregio 24.