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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 20: Poster: Colloids and Complex Liquids

CPP 20.6: Poster

Dienstag, 12. März 2013, 18:15–20:15, Poster C

Micro-fabricated ionic liquid colloid emitter based on SU-8 capillaries with electroplated front electrodes — •Katharina Huhn, Markus Piechotka, Torsten Henning, and Peter J. Klar — Justus-Liebig-Universität, I. Physikalisches Institut, Heinrich-Buff-Ring 16, 35392 Gießen, Germany

We manufactured a colloid emitter device using the negative resist SU-8 with multiple step photolithography. In the first step thin capillaries were manufactured with an inner diameter varying between 10 to 100 microns whilst the height is about 40 microns. In the second step a spacer layer was patterned. A metal grid structure was deposited onto the top of the surface of the spacer layer using evaporation, electroplating as well as ion beam etching. Afterwards the substrate was removed by wet chemical etching. For testing the device was bonded on a tank filled with an ionic liquid. An electric field was applied between the ionic liquid and the extraction electrode by using a high voltage source. The electro-spray emission was observated via videoscopy. We investigated the influence of different ionic liquids and capillary diameters on the required extraction voltage.