Regensburg 2013 – wissenschaftliches Programm
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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 8: Poster: New Instruments and Methods
CPP 8.9: Poster
Montag, 11. März 2013, 17:30–19:30, Poster C
Dynamic SEM image analysis of vibrating cantilevers (II) — •Maria-Astrid Schröter1, Matthias Holschneider2, Christiane Weimann1, Martin Ritter3, and Heinz Sturm1 — 1BAM 6.9, Federal Inst. Materials Research, Berlin — 2Inst. Mathematics, Univ. Potsdam — 3Electron Microscopy TU Hamburg-Harburg
Dynamic Scanning Electron Microscopy (DySEM) is used to examine vibration modes and their harmonics at flexural and torsional resonance (1). In this part (II), the mathematical analysis of the imaging mechanism of DySEM is explained in detail. Recently, we presented a new model (2) describing the dynamic interaction of an electron beam with a periodically vibrating cantilever to explain and reproduce the topological features of amplitude images. Here we present an extended model taking into account the full periodic space-time dynamics i.e., amplitudes (moduli) and phase shifts as well as real and imaginary parts. A general methodology is demonstrated to distinguish non-linear features caused by the imaging process from those caused by cantilever motion. To describe complex dynamic contact behaviour, signal amplification is needed to enable measurements with a resolution below 10 nanometres. Strategies to improve image quality and sensitivity are discussed.
(1) Sturm, Schröter, Weimann; Microelectr. Eng. 98, 492 (2012).
(2) Schröter, Holschneider, Sturm; Nanotechn. 23, 435501 (2012).