Regensburg 2013 – wissenschaftliches Programm
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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 9: Poster: Interfaces and Thin Films (joint session with DECHEMA and VDI)
CPP 9.2: Poster
Montag, 11. März 2013, 17:30–19:30, Poster C
Microfabrication and characterization of stress-reduced YSZ membranes — •Florian Kuhl1, Markus Piechotka1, Daniel Reppin1, Torsten Henning1, Jürgen Janek2, and Peter J. Klar1 — 1I. Physikalisches Institut, Justus Liebig University, Heinrich-Buff-Ring 16, DE-35392 Giessen, Germany — 2Physikalisch-Chemisches Institut, Justus Liebig University, Heinrich-Buff-Ring 58, DE-35392 Giessen, Germany
The oxygen conductor YSZ (yttria-stabilized-zirconia) is a material often used as the electrolyte in solid oxide fuell cells. To achieve a lower operation temperature and to maximize the currents it is necessary to miniaturize the fuel cell components, especially to reduce the thickness of the solid electrolyte. Another application of very thin YSZ films may be their utilization as an ion source. We fabricated free-standing YSZ mebranes by partially removing a Si substrate by anisotropic wet-chemical etching. We characterized the resulting inhomogeneous strain distribution and found a correlation between the size of the mebranes and the strain induced pattern. Arrays of free-standing stress-reduced membranes with a high packing density were prepared by using cross-like masking patterns. Deposition of a porous Pt electrode onto the YSZ membranes allows the measurement of their ionic conductivities.