Regensburg 2013 – scientific programme

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DF: Fachverband Dielektrische Festkörper

DF 19: Poster 2

DF 19.20: Poster

Wednesday, March 13, 2013, 15:00–17:30, Poster B2

Large-scale 3D simulation and analysis of acoustic waves inpiezoelectric materials — •Tristan Koppe, Julian Amani, Hans Hofsäss, and Ulrich Vetter — 2. Physikalisches Institut, Georg-August-Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen

Bulk and surface acoustic waves (BAW/SAW) are used to create compact, cost-efficient and easy to produce (sometimes even CMOS compatible) high frequency filters, resonators and compressors with superior properties essential for modern mobile and wireless communications. Numerical simulations of SAW/BAW structures have become a powerful tool for research and development of new devices and applications. A finite element package for SAW and BAW simulations has been designed to describe non-periodic three dimensional SAW/BAW devices in time domain. The simulation features the computation of systems with several million elements. Especially 2H-AlN thin films on substrates with various interdigital transducer configurations are considered.