Regensburg 2013 – scientific programme

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DS: Fachverband Dünne Schichten

DS 11: Poster Session I: Application of thin films; Ion beam induced surface patterns; Ion and electron beam induced processes; Micro- and nanopatterning (jointly with O)

DS 11.16: Poster

Monday, March 11, 2013, 17:00–20:00, Poster B1

Submicrometer precise machining of metal surfaces with excimer laser radiation — •Martin Ehrhardt, Frank Frost, Pierre Lorenz, and Klaus Zimmer — Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstraße 15, 04318 Leipzig, Germany

In recent decades, the patterning of surfaces with nanostructures is of rapid growing interest due to the large range of applications of these improved surfaces in the fields of, e.g. optics, biology, and microelectromechanical systems. Imprint techniques are promising for low-cost and large-area pattering. However, imprint techniques which allow submicrometer structuring of hard materials like metals have to be combined with an etching step up to now. Laser embossing is a novel high strain rate imprint technique which allows overcoming this limitation. The process bases on laser pulses which generate a high pressure by ablation of an auxiliary material. The high pressure is used to compress a structured mould form onto metal surfaces which take the shape of the mould. In the present study it will be shown that submicrometer structures can be successfully transferred from the mould into polycrystalline and single crystal copper. The structures generated that way will be analyzed by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The results will be correlated with the laser parameters used and the dimensions of the mould structures.